Equipment
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iNTROS
Equipment BusinessSpecializing in the installation of semiconductor equipment, iNTROS can flexibly respond to all the work from installation to removal on the basis of its Setup know-how in order to optimize a customer’s request.
Based on the achievements of new equipment Setup and Relocation, iNTROS is equipped with the most professional know-how. With plenty of equipment SOP ranging from carry-in, to installation, to removal, and to calibration, the company has advanced technology power and professionalism and provides a high level of service in China.8C/6C Common Specification
The purpose of the work is to implement the equal process performance of FAB according to the vital points standard form applied commonly to semiconductor equipment.
In consideration of the performance and use condition of parts by the vital points of equipment, equipment is installed according to each check sheet and proper specification.
Checkpoints of 8C/6C
Connection parts of the main body drive transmission system lubrication system pneumatic system
An example of sticker attachment
| Item | Purpose | Check Region |
|---|---|---|
| Check of Connection | This process is aimed at connecting all parts of equipment with the main body in balance for accurate operation. |
basic state basic bolt level bolt calibration state screw rust screw thread state loose/screw head looseproof/abrasion, etc. the existence of washer, etc. check of all the connected regions |
| Check of Drive/Transmission | The process is aimed at transmitting natural energy to a machine, converting it into kinetic energy, and keeping the continuity of processed points. |
I-marking Connection check |
| Check of Lubrication | Lubricating oil is divided into oil, grease, and cutting oil. The process is aimed at reducing friction and preventing transformation by moving a sliding unit softly. If there is any defect in each region, it is possible to cause poor quality or fault. |
Connection check I-marking Gauge spec management |
| Check of Pneumatic | The process is aimed at moving straight lines and curve lines softly with the use of air pressure. |
I-marking Spec management Label attachment End Cap processing Connection check |
| Check of Hydraulic | The process is aimed at doing the straight line motion based processing work with the use of oil pressure. |
Gauge spec management I-marking Spec management Label attachment Flow direction display Connection check, etc. |
| Electronic Control |
The process is aimed at converting electrical energy in order to keep the continuity of processing points. If there is any defect in each region, such as loosening system switch for supplying energy to multiple devices or damaged insulating coating of external wires, it is possible to cause poor quality or fault. |
I-marking Resistance value measurement Label attachment Properties separation Cable compliance Sensor check, etc. |
| Others | All parts of equipment are checked, and such items as End Cap, port, Sticker, Label, and I-Marking, are processed. |
